OLS4100 Application

• 반도체/FPD
• 전자 부품 / MEMS
• 재료/금속 가공

반도체/FPD(Flat Panel Display)

전자 부품 / MEMS (미세 전자 기계 시스템)

재료/금속 가공

With the Olympus LEXT OLS4100 laser scanning digital microscope non-contact 3D observations and measurements of surface features at 10 nanometer resolutions are easy to produce. The OLS4100 industrial microscope has distinctive features for fast image acquisition and high-resolution microscope images over a wider area.

• 뛰어난 측정 성능
• 세계 최초* 두개의 성능 보증
• 고품질 이미지
• 더 쉽게, 더 빠르게, 더 광범위하게.

뛰어난 측정 성능

넓은 샘플 범위

85°이상의 경사도 이미지

OLS4100은 높은 N.A값을 갖는 전용 대물 렌즈와 405nm 레이저의 성능을 극대화 시킨 광학 시스템에 의해서 기존에 측정 불가능했던 급경사면의 이미지를 손쉽게 취득할 수 있습니다.

10nm의 높이 분해능을 가진 마이크로 프로파일 측정

405nm의 단파장 레이저 빛과 높은 N.A의 전용 대물 렌즈를 사용하여 최대 0.12μm의 평면 분해능을 실현. 샘플 표면의 서브 마이크론 측정이 가능합니다. 또한 고정밀 리니어 스케일과 IZ 커브를 이용한 CFO 검색 (23 페이지 참조)를 채택하여 10nm 이하의 높이 차이를 감지 할 수 있습니다.

반사율 차이에도 대응

OLS4100은 2개의 공초첨 광학 시스템을 탑재한 듀얼 컨포칼 시스템을 사용합니다. 고감도 디텍터(검출기)와 결합하여 서로 다른 반사율을 갖는 샘플에서도 선명한 이미지 구현이 가능합니다.

멀티 레이어기능으로 투명한 물체의 측정에 대응

멀티 레이어 모드
OLS4100에 추가 된 멀티 레이어 기능은 여러 레이어 (층)의 반사광 강도의 피크를 인식하여 각 층의 두께를 측정할 수 있습니다.

투명 소재의 멀티 레이어 관찰/측정
멀티 레이어 기능을 사용하면 투명 샘플의 윗 표면에 있는 투명 필름의 관찰과 측정이 가능합니다. 레진이 코팅 되어 있는 샘플에서도 투명체 각 층의 거칠기와 두께의 측정도 가능합니다.

세계 최초* 두개의 성능 보증

정확도와 반복성

측정 기기로서의 성능은 두 개의 다른 용어로 표현됩니다. 그것은 ‘정확도’과 ‘반복성’입니다. “정확도”는 참값에 얼마나 접근하고 있는지를 나타내고 “반복성”은 여러 번 측정에서 얼마나 변동이 적은가 여부를 나타내는 것입니다. OLS4100은 레이저 현미경으로 업계 최초로 *이 두 성능을 보증합니다.

보증 체계 시스템

OLS4100은 모든 부품이 엄격한 시스템 아래 하에 제조되고 있습니다. 대물 렌즈부터 본체까지 자사 공장에서 일관 생산하고 엄격한 검사 기준을 거쳐 출하됩니다. 최종 조정과 교정은 실제로 사용되는 환경에서 전문 기술자가 수행합니다.

넓은 범위의 측정 타입

단차 측정

표면 거칠기 측정

면적/부피 측정

입자 측정(옵션)

기하학적 측정

필름 두께 측정(옵션)

자동 에지 검출/측정(옵션)

OLYMPUS Stream (옵션)

향상된 이미지 분석 성능을 위한 업무개선 솔루션
소프트웨어 “Olympus Stream”(옵션)에서는 입자 크기 분석 및 비금속 함유율 등이 가능하고 OLS4100으로 부터 바로 연동이 가능합니다.

더욱 더 진화된 거칠기 측정

LEXT OLS4100 파라미터

OLS4100은 표면 거칠기 측정기의 새로운 기준을 목표로 개발되었습니다. 필요한 대부분의 거칠기 파라미터 필터를 보유하고 있습니다. 그렇기 때문에 기존의 접촉식 표면 거칠기 측정기를 사용하는 사용자는 기존의 장비와 일치한 출력 결과를 얻을 수 있습니다..
또한 OLS4100은 거칠기 전용 모드가 있어 자동 라인 스티치로 최대 100mm까지 거칠기 측정이 가능합니다. OLS4100은 접촉식 표면 거칠기 측정기와 같은 거칠기 (2 차원) 파라미터를 보유하고 있습니다. 접촉식 표면 거칠기 측정기와 같은 조작성, 호환 측정 결과를 얻을 수 있습니다.

진폭 파라미터	Sq, Ssk, Sku, Sp, Sv, Sz, Sa
기능 파라미터	Smr(c), Sdc(mr), Sk, Spk, Svk, SMr1, SMr2, Sxp
체적 파라미터	Vv(p), Vvv, Vvc, Vm(p), Vmp, Vmc
평면 파라미터	Sal, Str

LEXT OLS4100은 표면 거칠기 측정기의 결과와 호환성을 가지고 있습니다.

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마이크로 거칠기

접촉식 표면 거칠기 측정기는 스타일러스의 팁 지름보다 작은 마이크로 표면을 측정 할 수 없습니다. 레이저 현미경은 레이저 스폿 직경이 미세하기 때문에 미세형상을 높은 분해능으로 거칠기 측정 할 수 있습니다.

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비 접촉 측정

접촉식 표면 거칠기 측정기는 스타일러스에 의해 부드러운 샘플의 표면을 긁어 손상시키거나 변형시킬 가능성이 높습니다. 또착 접착성이 있는 샘플에서는 스타일러스에 끌려 정확한 측정 결과가 나오지 않습니다. 레이저 현미경은 비접촉이기 때문에 표면 상태에 영향을 받지 않고 정확한 거칠기 측정을 할 수 있습니다.

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마이크로 영역에서의 측정

접촉식 표면 거칠기 측정기는 스타일러스를 표면에 접촉하지 않고는 측정 할 수 없습니다. 레이저 현미경은 위치를 정확하게 확인하고, 목표한 마이크로 영역에서 거칠기 측정을 아주 쉽게 할 수 있습니다.

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고품질 이미지

선명한 3D 컬러 이미지

통합이미지의 3가지 유형

LEXT OLS4100은 동일한 시각의 컬러 이미지, 레이저 현미경이미지, 높이 이미지를 동시에 얻을 수 있으며, 각각 2D・3D로 볼 수 있습니다. 레이저 현미경 이미지 뿐만 아니라 컬러 이미지도 초점이 맞는 이미지만 캡처 하기 때문에 선명한 이미지를 얻을 수 있습니다.

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자연 컬러 재연

OLS4100은 백색 LED를 사용하며, 색 재현이 뛰어난 촬상 소자와 결합하여 선명하고 자연스러운 색조의 컬러 이미지를 생성 할 수 있습니다.

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실제 표면 재현, 레이저 DIC (미분 간섭 대비)

미분 간섭 관찰(DIC)은 레이저 현미경의 분해능을 더 넘어선, 나노 미터 수준의 미세한 표면을 시각화하는 관찰 방법입니다. 이 레이저 DIC에 의해 OLS4100은 저배율의 라이브 관찰에서도 전자 현미경의 분해능과 같은 이미지를 얻을 수 있습니다.

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밝기와 대비의 최적 밸런스 HDR (High Dynamic Range) 이미지

OLS4100의 HDR기능은 다른 노출로 촬영 한 여러 가지 광학 현미경 이미지를 결합하고 개별적으로 밝기, 명암, 질감과 채도를 조정하여 넓은 동적 범위의 HDR 프로세스로 이미지화합니다. OLS4100은 대비가 부족한 샘플의 미세 형상도 선명히 라이브 화상으로 관찰 할 수 있습니다.

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측정 및 이미지 환경의 안전화

OLS4100은 외부의 영향을 억제하여 측정 및 이미징 환경을 안정시키기 위해 본체에 코일 스프링과 댐핑 러버로 이루어진 ‘하이브리드 제진 장치 “를 내장하고 있습니다. 따라서 전용 제진대 없이도 측정이 가능합니다.

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더 쉽게, 더 빠르게, 더 광범위하게.

3단계의 간단 조작

OLS4100에서는 샘플을 스테이지에 올리는 것 만으로, 곧바로 관찰 · 측정을 시작할 수 있습니다. 간단한 이미지 획득, 측정, 보고서 작성 이 3 단계로 레이저 현미경에 익숙하지 않은 초보자도 쉽게 측정 방법을 마스터 할 수 있습니다.

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항상 샘플의 위치를 알 수 있습니다.

매크로 맵 기능

OLS4100에서는 매크로 맵 기능이 있기 때문에 “샘플이 지금 어디에 있는지”를 화면에 나타낼 수 있습니다. 전동 리볼버를 사용하기 때문에 저배율의 광범위한 샘플 이미지를 자동으로 표시합니다.
또한 스티칭 기능을 사용하면 기존에 비해 최대 441 배 넓은 시야의 매크로 맵을 만들 수있게 되었습니다.

고속 매크로 맵 스티칭

2가지 스티칭 방법으로 넓은 영역의 스캐닝이 가능합니다.: 라이브 영상 획득 및 빠른 이미지 획득을 위한 자동 모드, 수동 모드.
한 번의 클릭으로 자동으로 이미지를 스캔할 수 있으며, 보다 넓은 범위를 빠르게 획득 할 수 있습니다. 또한 자동 스티칭 사이즈는 5종류(3×3、5×5、7×7、9×9、21×21)에서 선택할 수 있습니다. 획득한 이미지의 불필요한 부분은 간단한 마우스/조이스틱 조작으로 제거 할 수 있습니다.

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간편한 3D 이미징 스마트 스캔

자동 3D 이미지 획득

스마트 스캔 기능을 새롭게 첨가한 OLS4100. 기존의 3D 검사는 초보자에게는 어려운 복잡한 설정이 필요했지만, 스마트 스캔 기능을 통해 쉽게 3D 이미지 전송을 할 수있게 되었습니다. 상하단 설정 이외에 밝기 조정도 자동으로 수행되며 한 번의 클릭으로 이미지 전송이 가능하여 초보자도 숙련자와 같은 최적의 이미지 획득이 가능합니다.

자동 밝기 조절

평면 밝기 조절                                              높이의 범위 내에서 밝기 조절

획득 시간이 대폭 단축

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스캐닝 스피드의 고속화

새롭게 생긴 초고속 모드는 기존 고속 모드의 약 2배, 고화질 모드의 약 9배의 속도로 스캔 할 수 있습니다. 이를 통해 광범위의 Z축 방향의 획득과 고배율이 필요한 칼 끝 같은 급경사 각도를 가진 샘플의 측정도 단시간에 가능합니다.
* 실제 스캔 시간은 Z축 방향의 범위 및 대물렌즈의 배율 등에 의해 변동됩니다.

동일 시간에 따른 이미지 획득 수:

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필요한 부분만을 고속 스캔

OLS4100 밴드 스캔 기능은 샘플 검사 범위를 한정함으로써 원래의 약 1 / 8의 고속 측정이 가능합니다.

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새로운 고속 스티칭 모드

넓은 영역의 스티칭 이미지에서 원하는 영역을 지정

매크로 맵과 같은 절차로 획득한 광범위의 이미지에서 3D 스티칭 범위를 지정할 수 있습니다. 최대 625장의 이미지 스티칭이 기존의 절반의 소요시간으로 생성 가능합니다. 스티칭의 범위를 지정하는 방법은 사각형뿐만 아니라 원형으로도 선택할 수 있습니다.

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수동으로 필요한 영역을 지정

실시간 관찰 모드로 화면에서 필요한 부분을 추적하여 수동으로 선택할 수 있습니다. 관찰 할 샘플이 불규칙한 형태를 가지고 있을 경우 편리합니다.

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빠른 이미지 획득

스마트 스캔을 사용하여 이미지 획득을 한 번의 클릭으로 시작할 수 있습니다. 스마트 스캔 모드에서 Z축 방향 설정이 자동으로 이루어 지므로 Z축 방향의 획득 범위를 한정함으로써 더 많은 시간을 단축할 수 있습니다.

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빠르고 이해하기 쉬운 보고서 작성

관찰 · 측정 결과의 신속한 보고서 작성도 레이저 현미경의 중요한 역할입니다. OLS4100은 측정 종료 후 한 번의 클릭으로 보고서 작성이 가능합니다. 개별 템플릿 사용자 지정이 자유 자재로 할 수있는 등 다양한 편집 기능도 갖추고 있습니다.

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한번의 클릭으로 여러장의 이미지를 일괄 측정

상세 사용자 마법사 설정 기능은 긴 훈련의 필요 없이, 새로운 사용자도 빠르고 쉽게 작업을 할 수 있습니다.

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-> 응용분야에 대하여 더 보기

The STM7 microscopes offer excellent versatility and high performance three axis measurements of parts and electrical components, with sub-micron precision. Whether samples are small or large, simple or complex, or measurements are being taken by a novice or an expert, the Olympus STM7 range features measuring microscopes tailored to fit your needs.

• Accurate Measurements through the Integration of an Optical Microscope and Advanced Measurement Capability
• The STM7 was Designed with Emphasis on Ease of Use
• Accessories that Widen the Range of Observation and Measurement
• Automated Focusing System Provides Superior Repeatability
• System for Achieving More Advanced Measurement

Accurate Measurements through the Integration of an Optical Microscope and Advanced Measurement Capability

Observation Performance Refined through Years of Microscope Development

The STM7 series uses the same UIS2 infinity-corrected optical system used in state-of-the-art optical microscopes. As a result, observed images have high resolution and high contrast, with aberration thoroughly eliminated to help ensure highly accurate measurement in minute detail.

Measurement Reliability Enhanced with a Stage-Mounting Plate Crafted from Stone

To provide further assurance of measurement accuracy, the STM7 series uses a highly durable, vibration-resistant frame with a granite surface plate. As a result of this stability, measurements can be taken at sub-micron-levels while ensuring minimal error.

Continuing to Provide User-friendly, High-Precision, 3-axis Measurement as a Pioneer of Height Measurement

As modern manufacturing technology becomes increasingly miniaturized and precise, highly accurate measurements are even more essential—not only along the horizontal XY axes, but also along the Z-axis. Olympus has responded to such needs by being the fi rst to realize an autofocus system for measuring microscopes by means of the reflective active, confocal method.

Dependable Quality Based On a Strict Traceability System

The accuracy of Olympus’ measuring microscopes is controlled by a strict traceability system and Olympus even offers traceable calibration at the time of installation.

The STM7 was Designed with Emphasis on Ease of Use 

Offering Stages to Fit the Sample Size at Hand

Common Problems

• Short measurement stroke precludes the measurement of larger samples.
• Sample rotation required to compensate for shorter Y than X-axis coverage during measurement is time inefficient. Until now, large stages have offered a sufficient measurement coverage on the X-axis, but only less coverage on the Y-axis.
• Due to the narrow measurement range, it is impossible to line up large numbers of samples on the stage for measurement at once.

STM7 Solutions

• Four types of stages are available, each with a unique square measurement stroke (choose from 50 mm x 50 mm, 100 mm x 100 mm, 200 mm x 200 mm, and 300 mm x 300 mm). From small to large size samples, there is a stage that fits the sample being measured.
• A clutch system enables rapid switching between coarse and fine movements. Thanks to this switching function, the stage can also be moved rapidly along the X- and Y-axes, and freely across the XY plane.
• The 300 mm square length stage enables the same measurement stroke to apply to both the X and Y-axes, which means it can be used to measure large samples, such as 300 mm wafers and printed circuit boards without changing their orientation.

Use the Same Microscope for Both Low- and High-Magnification Observations

Common Problems

• Most conventional measuring microscopes only accept a measuring objective or metallurgical objective, and so are unable to meet the requirements for a wide variety of observations.

STM7 Solutions

• The STM7 accepts both a metallurgical objective and a measuring objective by exchanging a revolving nosepiece with a measuring objective adapter. This means that the STM7 combines both metallurgical optics and measuring optics in one microscope. In this way, the STM7 series satisfi es a range of needs, no matter whether measuring a wide area or tiny region, measuring the size of differences betwe en levels, or assisting the user in deciding on the best observation method to choose.

Measuring Objectives

Because the measuring objectives have an extremely long working distance, they provide confidence when focusing on samples with large peaks and troughs while reducing worries of the objective coming into contact with the sample.
Furthermore, their low-magnifi cation capability enables wide areas to be observed in a single view.

Metallurgical Objectives

Metallurgical objectives enable high-magnifi cation, highresolution observation capability comparable to that of optical microscopes. What’s more, these objectives can be used not only for brightfield, but also for darkfield and DIC observation.

> Click here for details about UIS2 objective lenses

Manual and Motorized Focusing Model Options

The STM7 Line Includes both Manual and Motorized Focus Options

Focus control is available with either manual or motorized operation. Choose the model that addresses your needs in terms of samples and measurement content, regardless of stage size—with all frames incorporating a linear scale for the Z-axis that enables 3-axis measurement.

Manual Z-axis Focus Models

Manual Z-axis focus models offer excellent cost performance—with familiar handle operation for rapid vertical movement that offers convenience for users who needs to measure samples with variety of heights.

Motorized Z-axis Focus Models

Operability is improved and handling fatigue is reduced for focus and height measurements when using the motorized focus unit. The coaxial knobs for coarse and fine movement offer a feeling similar to manual operation, while the models can also be equipped with an autofocus unit.

A Revolutionary Control Unit Refines Measuring Microscope Usability

Common Problems

• Additional functions require additional operational units. Operators can’t always locate the corresponding unit quickly, which significantly reduces measurement efficiency.
• Numerous operational units and their power supplies around the main unit occupy valuable working space.

STM7 Solutions

Controllers

With the STM7 series, a single controller makes it possible to perform virtually all measuring microscope operations, including use of readout reset, illumination control, focusing, and autofocus. For efficiency and convenience, the unit can be placed wherever you wish and operated easily with one hand.

Control Box

The power supply and transmission for each unit are combined in a single control box. This preserves maximal work space even when a range of optional functions, such as the focus navigator, are added.

Automatic Light Intensity Adjustment Greatly Improves the Efficiency of Observation and Measurement

Common Problems

• Analog volume adjustment used by conventional measuring microscopes does not enable the quantitative assessment of light intensity, which can lead to variability in measured values as light intensity changes.
• With conventional measuring microscopes, light intensity may need to be adjusted every time the objective is switched—making for an inefficient workflow.

STM7 Solutions

Close Control through a Quantitative Digital Display of Light Intensity Values

The STM7 series provides a quantitative digital display of light intensity—enabling observations to always be made under consistent illumination conditions.

Light Intensity Manager Eliminates the Need for Manual Adjustment

Light intensity manager can be used with the coded revolving nosepiece configuration. The coded revolving nosepiece automatically detects the switching of objectives. This allows the illumination method and light intensity to be registered for each objective, and adjusted automatically during measurements when the objective is switched. Now there is no need to manually adjust light intensity, which used to be required with every switch between magnifications.

A Detachable Digital Read Out for Preferred Location Enables Swift, Convenient Checking of Measurement Results and Equipment Status

Common Problems

• The need to check the operation status of equipment, such as illumination, or measured values on individual units makes overall operation cumbersome.

STM7 Solutions

Digital Indicator Enables the Current Operation Status to be Verified Visually

The indicator displays the device status and settings. The minimum X, Y, and Z-axis values can be switched between 0.1 μm and 1 μm, and the display units can be switched between mm, μm, inches and mil.

Detachable Digital Readout Allows for Individual Preference and Placement

Whether attached to the frame or a desk, the placement of the detachable digital readout is up to the individual user. While standing to take measurements, it can be placed on the side of the frame at almost the same height as the site of observation for an exceptional and easy view. When operating from a sitting position, such as observation or measurements on a monitor via a digital camera or when using the motorized Z-axis focusing model, simply place the digital readout and hand controller on the desk.

Automated Focusing System Provides Superior Repeatability

Achieve Faster, Simpler, More Accurate Height Measurement

Common Problems

• When doing visual measurement, variations can arise in the height measurements between different operators. Furthermore, this measurement method is time-consuming and inefficient.

STM7 Solutions

Simple and Highly-Precise Focusing System with Superior Repeatability

The Olympus’ focus navigator delivers highly reproducible height measurement by projecting a pattern within the fi eld of view and identifying vertical deviations. Slight errors can occur in height measurements taken with normal visual observation, even when focus appears to be sharp. The focus navigator, however, enables measurements to be made simply by matching up the marks—thereby reducing operator subjectivity in measurement results.

Focus Navigator

 

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Autofocus Advantage for Fast and Highly Accurate Height Measurement

Common Problems

• During visual measurement, the results of height measurement can vary between different operators.
   
• Manual height measurement requires the operator to repeatedly move the stage and adjust the focus with the handle, making measurement time-consuming and inefficient.
   
• Focusing on minute objects, such as bonding wires, is difficult.

STM7 Solutions

Dedicated Autofocus Unit: Outstanding Reproducibility and Focusing Speed

The STM7 dedicated autofocus unit allows highly accurate height measurements to be made with minimal time, regardless of the level of operator experience. Use of the reflective active, confocal method provides a stable focal point independent of surface roughness or a slanting sample surface, while the small laser diameter enables the use of autofocus, even on minute objects, such as bonding wires.

 One-shot Mode

Instantaneously takes autofocus from a roughly focused state to sharp focus located at the center of the field of view.

TRACK Mode

The featured TRACK Mode provides autofocus that tracks the peaks and troughs of the sample, even if the stage is moved, keeping the image continually in focus. This advancement greatly improves the efficiency of Z-axis measurements by enabling observations to be made without taking your hands off the X and Y handles.

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Accessories that Widen the Range of Observation and Measurement

Coded Revolving Nosepiece

Combining a coded revolving nosepiece with a digital camera lets you display the objective magnification on-screen during observation and allows you to record that magnification.
This convenient feature allows information on your sample and the objective’s magnification to be recorded at the same time when recording a sample.

MM6-EMO/ Erect Image Monocular Tube

Monocular tube for erect images. Can be used in combination with MM6-OCC10x (eyepiece with cross hairs).

STM7-FS/ Foot Switch

Enables hands-free transmission of data, allowing operators to complete measurement without taking hands off the X and Y handles.

SZ-LW61/ White LED Illumination Unit

This light-weight, space-saving design model provides a long operating life and low power consumption. The cost-effective LED illumination unit is also free from the flickering and brightness fluctuation.

SZX2-ILR66+SZX-RHS/ LED Ring Illuminator+Manual Control Unit

SZX-RHS manual control unit enables independent illumination of four-segments of the SZX2-ILR66 reflected LED ring illuminator, which provides clear images with high color temperature. The optimal illumination can be selected from 13 patterns.

Rotatable Stage

Enables easy parallel alignment of sample.

Example Configurations for Materials Science and Industry

BX53M Reflected and Reflected/Transmitted Light Combination

There are two types of microscope frames in the BX3M series, one for reflected light only and one for both reflected and transmitted light. Both frames can be configured with manual, coded, or motorized components. The frames are outfitted with ESD capability to protect electronic samples.

BX53M IR Combination

IR objectives can be used for semiconductor inspection, measurement, and processing applications where imaging through silicon is required to see the pattern. 5X to 100X infrared (IR) objectives are available with chromatic aberration correction from visible light wavelengths through the near infrared. For highmagnification work, rotating the correction collar of the LCPLNIR series of lenses corrects for aberrations caused by sample thickness. A clear image is obtained with a single objective.

BX53M Polarized Light Combination

The optics of the BX53M polarized light combination provide geologists with the right tools for high-contrast polarized light imaging. Applications such as mineral identification, investigating the optical characteristics of crystals, and observing solid rock sections benefit from system stability and precise optical alignment.

Bertrand Lens for conoscopic and orthoscopic observations

With a U-CPA conoscopic observation attachment, switching between orthoscopic and conoscopic observation is simple and fast. It is focusable for clear back focal plane interference patterns. The Bertrand field stop makes it possible to obtain consistently sharp and clear conoscopic images.

An Extensive Range of Compensator and Wave Plates

Six different compensators are available for measurements of birefringence in rock and mineral thin sections. Measurement retardation level ranges from 0 to 20λ. For easier measurement and high image contrast, the Berek and Senarmont compensators can be used, which change the retardation level in the entire field of view.

Measuring range of compensators

*R = retardation level

For more accurate measurement, it is recommended that compensators (except U-CWE2) be used together with the interference filter 45-IF546.

Strain Free Optics

Thanks to Olympus’ sophisticated design and manufacturing technology, the UPLFLN-P strainfree objectives reduce internal strain to the minimum. This means a higher EF value, resulting in excellent image contrast.

BXFM System

The BXFM can be adapted to special applications or integrated into other instruments. The modular construction provides for straightforward adaptation to unique environments and configurations with a variety of special small illuminators and fixturing mounts.

Modular Design, Build Your System Your Way

Microscope Frames

There are two microscope frames for reflected light, one also has transmitted Light; capability. An adapter is available to raise the illuminator to accommodate taller samples.

Stands

For microscopy applications where the sample will not fit on a stage, the illuminator and optics can be mounted to a larger stand or to another piece of equipment.

BXFM + BX53M illuminator configuration

Unit Combination Required: (1, 2 and 6)
Option: 3

BXFM + U-KMAS illuminator configuration

Unit Combination Required: (1, 4 and 5) or (1, 4 and 6)
Option: –

Tubes

For microscope imaging with eyepieces or for camera observation, select tubes by imaging type and operator’s posture during observation.

Illuminators

The illuminator projects light onto the sample based on the observation method selected. Software interfaces with coded illuminators to read the cube position and automatically recognize the observation method.

Light Sources

Light sources and power supplies for sample illumination, choose the appropriate light source for the observation method.

Standard LED light resource configuration

Unit Combination Required: (1 and 3) or 4^*1
Option: 2
*1：Only using BX53MTRF-frame

Fluorescence standard light resource configuration

Unit Combination Required: (5, 6 and 8) or (5, 7 and 8)
Option: 2

Fluorescence mercury light resource configuration

Unit Combination Required: (9 and 11) or (10 and 11)
Option: 2

Halogen and Halogen IR light resource configuration

Unit Combination Required: (12 and 15) or (12 and 16) or (13 and 15) or (13 and 16)
Option: 14, 17

Nosepieces

Attachment for objectives and sliders. Select by the number of objectives needed and types; also with/without slider attachment.

Sliders

Select the slider to compliment traditional brighfield observation. The DIC slider provides topographic information about the sample with options to maximize contrast or resolution. The MIX slider provides illumination flexibility with a segmented LED source in the darkfield path.

MIX slider for MIX observation.

Controls Box and Hand Switches

Control boxes for interfacing microscope hardware with a PC and hand switches for hardware display and control.

BX3M-CB (CBFM) configuration

Unit Combination Required: 1 or 2
Option: 3, 4, 5

U-CBS configuration

Unit Combination Required: 6
Option:  5

 Cable

Stages

Stages and stage plates for sample placement. Select based on sample shape and size.

150 mm × 100 mm stage configuration

Optical Filters

Optics filters convert sample exposure light to various types of illumination. Select the appropriate filter for observation requirements.

Mirror Units

Mirror unit for BX3M-URAS-S. Select the unit for required observation.

Intermediate Tubes

Various types of accessories for multiple purposes. For use between tube and illuminator.

UIS2 Objectives

Objectives magnify the sample. Select the objective that matches the working distance, resolving power and observation method for the application.

> Click here for details about UIS2 objective lenses

A History of Leading-edge Optics

Superior Optical Performance： Wave Front Aberration Control

When using a microscope for advanced research or system integration, optical performance must be standardized for all objectives. Olympus’ UIS2 objectives go beyond conventional numerical aperture (NA) and working distance (WD) performance standards by providing wave front aberration control, that minimizes the aberrations that lower resolution.

Stable Color Temperature and High-Intensity White LED Illumination

The BX3M utilizes a high-intensity white LED light sources for both reflected and transmitted light. The LED maintains a consistent color temperature regardless of intensity. LEDs provide efficient, long-life illumination that is ideal for inspecting materials science applications.

Superior Quality for Advanced Performance

Support Precise Measurement： Auto Calibration

Similar to digital microscopes, automatic calibration is available when using OLYMPUS Stream. Auto-calibration eliminates human variability in the calibration process leading to more reliable measurements. Auto calibration uses an algorithm that automatically calculates the correct calibration from an average of multiple measurement points. This minimizes variance introduced by different operators and maintains consistent accuracy, improving reliability for regular verification.

Seamless Stitching : Image Shading Correction

Shading correction is implemented within OLYMPUS Stream software to accommodate for shading around the corners of an image. When used with intensity threshold settings, shading correction provides more precise analysis. Additionally, a more uniform panoramic image is acquired when tiling images with MIA.

• Left image: Raw image illustrating shading where images were stitched together
• Right image: Shading correction produces even illumination across the field of view

Functionality for a Range of Inspection and Analytical Tasks

The Invisible Becomes Visible: MIX Observation

The BX3M’s MIX observation technology combines traditional illumination methods with darkfield illumination. When the MIX slider is used, its ring of LEDs shine directional darkfield on the sample. This has a similar effect to traditional darkfield, but provides the ability to select a quadrant of the LEDs in order to direct the light from different angles. This combination of directional darkfield and brightfield, fluorescence, or polarization is called MIX illumination, and is especially helpful to highlight defects and differentiate raised surfaces from depressions.

Conventional 

Brightfield shines the light straight down on the sample while traditional darkfield highlights scratches and imperfections of a flat surface by illuminating the sample from the side of the objective.

Advanced

MIX is a combination of either brightfield, fluorescence, or polarized light and directional darkfield from a ring of LEDs. The LEDs can be adjusted to select which direction to illuminate from. This provides unique contrast and highlights features on the surface that cannot seen with conventional methods.

Easily Move the Stage for Panorama: Instant MIA

You can now stitch images easily and quickly just by moving the XY knobs on the manual stage; no motorized stage is necessary. OLYMPUS Stream uses pattern recognition to generate a panoramic image giving users a wider field of view than a single frame.

Create All-in-focus Images: EFI

The Extended Focus Imaging (EFI) function within OLYMPUS Stream captures images of samples whose height extends beyond the depth of focus of the objective and stacks them together to create one image that is all in focus. EFI can be executed with either a manual or motorized Z-axis and creates a height map for easy structure visualization. It is also possible to construct an EFI image while offline within Stream Desktop.

Capture Both Bright and Dark Areas: HDR

Using advanced image processing, high dynamic range (HDR) adjusts for differences in brightness within an image to reduce glare. HDR improves the visual quality of digital images thereby helping to generate professional-looking reports.

Adaptable to Suit Observational and Analysis Preferences

Wide Choice of Observation Methods

Reflected light microscopy spans a range of applications and industries.These are just some of the examples of what can be achieved using different observation methods, such as brightfield(BF), darkfield(DF), differential Interference Contrast(DIC), polarized light(PL), fluorescence(FL), infra-red(IR), and transmitted light(TL).

Routine or Basic Measurement Functions

Various measurement functions are available through OLYMPUS Stream so that the user can easily obtain useful data from the images. For quality control and inspection, measuring features on images are often required. All levels of OLYMPUS Stream licenses include interactive measurement functions such as distances, angles, rectangles, circles, ellipses, and polygons. All measured results are saved with the image files for further documentation.

Count and Measure

Object detection and size distribution measurement are among the most important applications in digital imaging. OLYMPUS Stream incorporates a detection engine that utilizes threshold methods to reliably separate objects (e.g., particles, scratches) from the background.

Materials Science Solutions

OLYMPUS Stream offers an intuitive, workflow-oriented interface for complex image analysis. At the click of a button, the most complex image analysis tasks can be executed quickly, precisely, and in compliance with most common industrial standards. With a significant reduction in processing time for repeated tasks, materials scientists can concentrate on analysis and research. Modular add-ins for inclusions and intercept charts are easily performed at any time.

3D Sample Measurement

When using an external motorized focus drive, an EFI image can be quickly captured and displayed in 3D. The height data acquired can be used for 3D measurements on the profile or from the single view image.

Accommodates a Wide Range of Samples

View More Sample Types and Sizes

The new 150 × 100 mm stage provides a longer travel in the X direction than previous models. This, together with the flat-top design, enables large samples or multiple samples to be easily placed on the stage. The stage plate has tapped holes to attach a sample holder. The larger stage provides flexibility to users by enabling them to inspect more samples on one microscope, saving valuable lab space. The stage’s adjustable torque facilitates fine positioning under high magnification with a narrow field of view.

Flexibility for Sample Height and Weight

Samples up to 105 mm can be mounted on the stage with the optional modular unit. Due to the improved focusing mechanism, the microscope can accommodate a total weight (sample + stage) of up to 6 kg. This means that larger and heavier samples can be inspected on the BX3M, so fewer microscopes are required in the lab. By strategically positioning a rotatable holder for 6-inch wafers off-center, users can observe the whole wafer surface by just rotating the holder when moving through the 100 mm travel range. The stage’s torque adjustment is optimized for ease of use and the comfortable handle grip makes it easy to find the region of interest of the sample.

Flexibility for Sample Size

When samples are two large to place on a traditional microscope stage, the core optical components for reflected light microscopy can be configured in a modular configuration. This modular system, the BXFM, can be mounted to a larger stand via a pole or mounted to another instrument of choice using a mounting bracket. This enables users to take advantage of Olympus’ renowned optics even when their samples are unique in size or shape.

Protect Electronic Devices from Electrostatic Discharge: ESD Compatible

The BX3M has an ESD dissipation capability that protects electronic devices from static electricity caused by human or environmental factors.